| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a crystal piece forming method for easily obtaining a crystal substrate (crystal piece) which has a uniform stable dimensional shape and can have the outer edge part less cracked. <P>SOLUTION: In the crystal piece forming method of obtaining a plurality of crystal pieces 1 from an AT-cut crystal wafer like a plane plate by etching, a mask film for taking the plurality of crystal pieces 1 respectively is formed on a principal flat surface of the crystal wafer 10. The crystal wafer is etched for a time which is 1.5 times as long as the time T required for piercing the crystal wafer after etching start. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
