| 发明名称 |
Electrostatic discharge protection of thin-film resonators |
| 摘要 |
A filter having a thin-film resonator fabricated on a semiconductor substrate and a method of making the same are disclosed. The filter has a bonding pad connected to the resonator and in contact with the substrate to form a Schottky diode with the substrate to protect the resonator from electrostatic discharges.
|
| 申请公布号 |
US6894360(B2) |
申请公布日期 |
2005.05.17 |
| 申请号 |
US20020209602 |
申请日期 |
2002.07.30 |
| 申请人 |
AGILENT TECHNOLOGIES, INC. |
发明人 |
BRADLEY PAUL D. |
| 分类号 |
H01L29/872;H01L21/822;H01L27/04;H01L29/47;H01L41/08;H01L41/18;H01L41/187;H03H3/02;H03H9/02;H03H9/05;H03H9/17;(IPC1-7):H01L31/075 |
主分类号 |
H01L29/872 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
