APPARATUS FOR CAPTURING CONTAMINANTS AT ATMOSPHERE IN FABRICATING SEMICONDUCTOR DEVICE AND METHOD FOR CAPTURING THE SAME,申请号KR20030079143-传众专利搜索

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发明名称	APPARATUS FOR CAPTURING CONTAMINANTS AT ATMOSPHERE IN FABRICATING SEMICONDUCTOR DEVICE AND METHOD FOR CAPTURING THE SAME
摘要
申请公布号	KR20050045177(A)	申请公布日期	2005.05.17
申请号	KR20030079143	申请日期	2003.11.10
申请人	HYNIX SEMICONDUCTOR INC.	发明人	KIM, HYUNG DO
分类号	H01L21/02;(IPC1-7):H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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