发明名称 |
Method for operating a positioning apparatus, and scanning microscope |
摘要 |
A method for operating a positioning apparatus that moves a positioning element comprises the steps of: generating a first and at least one further reference signal, the first reference signal corresponding to a first reference position and the further reference signal to a further reference position; generating a first and at least one further estimated value for the present position of the positioning drive; transferring the first reference signal and the estimated value to the positioning apparatus; establishing the first reference position using the positioning apparatus, and measuring the present position and generating a position signal that corresponds to the measured present position; transferring the further reference signal to the positioning apparatus; generating a further estimated value of the positioning drive position; transferring the further estimated value to the positioning apparatus; establishing the further reference position, and measuring a further present position and generating a further position signal that corresponds to the measured further present position; and cyclically repeating the steps at constant time intervals.
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申请公布号 |
US6894271(B2) |
申请公布日期 |
2005.05.17 |
申请号 |
US20020287069 |
申请日期 |
2002.11.04 |
申请人 |
LEICA MICROSYSTEMS HEIDELBERG GMBH |
发明人 |
WIDZGOWSKI BERND |
分类号 |
G02B21/00;(IPC1-7):H01J3/14;H01J40/14;H01J5/16 |
主分类号 |
G02B21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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