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发明名称
感光胶剥离液组成物及使用该组成物之感光胶的剥离方法
摘要
本发明之感光胶剥离液组成物,系对湿式腐蚀或乾式腐蚀制程中产生的变质或硬化的感光胶,以浸渍法、喷雾法、单片方式或气动方式,能以低温,短时间内轻易剥离,而露出于剥离液组成物之下方的金属膜质以及氧化膜质上不产生损伤。因此,使用本发明之感光胶剥离液组成物时,在后续漂洗制程中,不必使用如异丙醇、二甲亚般之有机溶剂,可以只用水来漂洗。
申请公布号
TW200516356
申请公布日期
2005.05.16
申请号
TW093118730
申请日期
2004.06.25
申请人
东友FINE-CHEM株式会社
发明人
李赫镇;金炳默;宋仙英;洪宪杓
分类号
G03F7/42
主分类号
G03F7/42
代理机构
代理人
黄显凯
主权项
地址
韩国
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