| 摘要 |
PROBLEM TO BE SOLVED: To provide a scribing device which can stably support a cutter and form a clear scribed line. SOLUTION: The scribing device is composed as follows. A holder 20 is supported vertically movable on a body 10. A piezo actuator 40 is held between the body 10 and the holder 20. A vertical oscillation of the piezo actuator is transferred to a cutter 30 attached on the lower end of the holder 20 so as to form the cutoff line on a work piece 100. An elastic member and a slide leg 60, which are separated by the piezo actuator 40, support the holder 20. The body 10, the holder 20, the oscillating actuator 40, the elastic member and the slide leg 60 are coaxially arranged. COPYRIGHT: (C)2005,JPO&NCIPI
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