| 摘要 |
PROBLEM TO BE SOLVED: To provide an infrared gas analyzer which is unlikely to leak gas (a sensitive gas). SOLUTION: The infrared gas analyzer is provided with a measuring cell 30, in which a sample gas is introduced on an optical path of infrared rays from a light source 20, and a detection part 10 for detecting the infrared rays passing through the measuring cell 30. The detection part 10 comprises a front chamber 41, a back chamber 42, a communicating chamber 43, a sensor 44 for detecting the pressure difference between the front chamber 41 and the back chamber 42, and gas-confining flow paths 12, 13, 14, 15 for penetrating the wall of a block 11 and occluded after the gas is confined in the front chamber 41 and in the back chamber 42. The gas-confining flow paths are occluded by plugs 16, 17 with cylindrical outer faces, and improve the sealing property. COPYRIGHT: (C)2005,JPO&NCIPI
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