| 摘要 |
PROBLEM TO BE SOLVED: To provide a silicon compound which is suitable as a precursor for forming thin films, to provide a raw material which comprises the silicon compound and is useful for forming thin films, and to provide a method for producing a thin film from the raw material for forming the thin films. SOLUTION: This silicon compound is represented by general formula (I). In general formula (I), an alkanediyl group represented by A is a group represented by the general formula (II). COPYRIGHT: (C)2005,JPO&NCIPI
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