发明名称 METHOD AND APPARATUS FOR AUTOMATED BI-DIRECTIONAL INTEGRATION OF PERIPHERAL DATA SOURCES FOR A PRODUCTION TOOL
摘要 A method and apparatus for automated bidirectional integration of peripheral data sources for a production tool couples the system components together in a web-based arrangement. The process tools and the peripheral data sources are configured as websites to provide information to the system. Certain components of the system are also configured as browsers to obtain available information and use this information to make decisions and perform actions.
申请公布号 WO2005008413(A3) 申请公布日期 2005.05.12
申请号 WO2004US22166 申请日期 2004.07.09
申请人 MKS INSTRUMENTS, INC.;HADAR, RON;SMITH, JOHN, ALEXANDER;RUPP, GERHARD;SCHIMUNEK, BERNHARD;ATTWOOD, MARK;LANDESMANN, LIOR;ELLIOT, BRENT;ROBINSON, TIM;LEV-AMI, UZI 发明人 HADAR, RON;SMITH, JOHN, ALEXANDER;RUPP, GERHARD;SCHIMUNEK, BERNHARD;ATTWOOD, MARK;LANDESMANN, LIOR;ELLIOT, BRENT;ROBINSON, TIM;LEV-AMI, UZI
分类号 G05B19/418;G06F;G06F19/00 主分类号 G05B19/418
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