| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a rotating rate sensor and a multi-axial detection type rotating rate sensor having strength against impact application and high reliability. <P>SOLUTION: This sensor has a constitution equipped with a ceramic gastight container 2 wherein a detection element and a circuit part are stored, and the detection element is electrically connected to the circuit part, and wiring for transferring a signal to be inputted into/outputted from the circuit part is provided, a pad electrode 3 connected to one plane on the outside surface of the gastight container 2, and to be electrically connected to the wiring provided on the gastight container 2, and silicone rubber 4 stuck on the gastight container 2. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
