ELECTROLYTIC PROCESSING APPARATUS AND ELECTROLYTIC PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To detect the endpoint of electrolytic processing stably with high precision and with a relatively simple construction. SOLUTION: The electrolytic processing apparatus comprises: a holding section 42 for holding a processing object; a processing electrode 50 which can come close to or into contact with the processing object; a feeding electrode 52 for feeding electricity to the processing object; a fluid supply section 72 for supplying fluid between the processing object and at least one of the processing electrode and the feeding electrode; a processing power source 78 for applying a voltage between the processing electrode and the feeding electrode; a drive section for causing relative movement between the processing object and at at least one of the processing electrode and the feeding electrode; and an eddy current sensor 110 for detecting the thickness of the processing object from a change in eddy current loss, said sensor being disposed not in contact with or separately by an insulator from the processing electrode and/or the feeding electrode. COPYRIGHT: (C)2005,JPO&NCIPI