| 摘要 |
PROBLEM TO BE SOLVED: To provide a mask for forming a thin film pattern, which prevents the occurrence of a display failure in a liquid crystal display and provides uniform film characteristics, by inhibiting a substrate from being bruised, and preventing the peeling of a protective film and a white spot on a black matrix layer. SOLUTION: The mask for forming the thin film pattern has an opening in the part for forming the thin film pattern, is used for patternizing the thin film through the opening of the mask in a state of contacting the mask with the substrate, and does not make a resin film coated into a pattern form, in a range of 200μm or nearer to an edge of the mask opening on a contacting side of the mask with the substrate. COPYRIGHT: (C)2005,JPO&NCIPI
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