| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a 3-dimensional measuring device capable of shortening measuring time and measuring an exact height. <P>SOLUTION: The 3-dimensional measuring device measures with the phase shift moire method, an image to be measured where a plurality of peculiar point pixels immediately changing its height from a horizontal level of its background pixel exist in the background pixel whose horizontal level varies. It comprises an image gaining means for optically gaining a plurality of picture images consisting of a 2-dimensional pixel array constituted of the background pixels and the peculiar point pixels, by moving a grating arranged in parallel to the horizontal level formed by the background pixel to be measured, a pixel information memory 72 for storing information of pixels necessary for measurement, an object pixel identifying means 45 for classifying the background pixels and the peculiar point pixels by using the pixel information, a background pixel height calculating means for determining the background pixel by using a plurality of the picture images, and a peculiar point pixel height calculating means 47 for determining the height of the peculiar point pixel from a plurality of picture images with the reference of the background image height. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
