| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dynamic mask module. <P>SOLUTION: The dynamic mask module 100 has a microcomputer system 110, a mask pattern producing device 120, and a light source 130. The mask pattern producing device 120 is disposed above a substrate 10 and electrically connected to the microcomputer system 110. The microcomputer system 110 transfers an image signal to the mask pattern producing device 120. The light source 130 is disposed above the mask patten producing device 120 with respect to a photoresist layer on the substrate 10. A mask pattern produced by the dynamic mask module 100 is of a dynamic image, and thus the mask pattern is changeable at any time. Further, manufacturing costs and time can be reduced. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
