发明名称 |
Shadow-free shutter arrangement and method |
摘要 |
As part of a system for processing a workpiece by applying a controlled heat to the workpiece, a heating arrangement includes an array of spaced apart heating elements for use in a confronting relationship with the workpiece to subject the workpiece to a direct radiation that is produced. A radiation shield includes a plurality of members supported for movement between (i) retracted positions, which allow the direct radiation to reach the workpiece, and (ii) extended positions, in which the plurality of members cooperate in way which serves to at least partially block the direct radiation from reaching the workpiece and to absorb radiation emitted and reflected by the workpiece and thereby achieve greater control of the time-temperature profile than previously obtainable. At least certain ones of the members move between adjacent ones of the heating elements in moving those certain members between the retracted and extended positions. Tubular, curved and plate-like member configurations can be used.
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申请公布号 |
US2005098553(A1) |
申请公布日期 |
2005.05.12 |
申请号 |
US20030706367 |
申请日期 |
2003.11.12 |
申请人 |
DEVINE DANIEL J.;LEE YOUNG J.;TIMANS PAUL J.;LEMA FRANK A. |
发明人 |
DEVINE DANIEL J.;LEE YOUNG J.;TIMANS PAUL J.;LEMA FRANK A. |
分类号 |
B23H;F27B5/14;F27B17/00;F27D5/00;F27D11/00;H01L21/00;(IPC1-7):F27D11/00 |
主分类号 |
B23H |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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