METHOD FOR SETTING INSPECTION SPECIFICATION IN THIN-FILM DISPLAY, APPARATUS AND METHOD FOR INSPECTING THIN-FILM DISPLAY, AND SAMPLE FOR SETTING INSPECTION SPECIFICATION IN THIN-FILM DISPLAY

摘要

PROBLEM TO BE SOLVED: To provide an inspection specification setting method, or the like for improving the yield of a thin-film manufacturing apparatus by limiting the influence of projecting defects to the minimum and for improving the quality. SOLUTION: In the method for setting an inspection specification for setting inspection specification in an inspection after the manufacture, based on the size of the projecting defects that are generated in the manufacturing process of an organic EL display panel and affect the display, a sample for setting the inspection specification is completed (step S3), which includes a thin film in which standard particles are scattered and has a function as an organic EL display panel after scattering the standard particle having a preset diameter on the surface of the thin film (step S2) after forming either thin film for composing the organic EL display panel, the presence or absence of defects on the display in a completed sample is inspected (steps S4 and S5), and the inspection specification in the inspection apparatus for inspecting the quality of the organic EL display panel after the manufacture is set (step S7) from the presence or absence of defects on the display and the diameter of a scattered standard particle. COPYRIGHT: (C)2005,JPO&NCIPI