| 摘要 |
<p>PURPOSE:To unite an electrostatic chuck and a heating apparatus and effectually and uniformly heat an article attracted and held on the electrostatic chuck. CONSTITUTION:A substrate 22 is coated with a first insulation layer 23, and on the upper surface of the first insulation layer 23 dielectrics 24, 25 constituting an electrode of an electrostatic chuck are provided and on the lower surface of the same a heater 26 including a heater 26 where a heater 26a is spirally arranged is integrally provided. Further, a second insulation layer 27 is provided on these surfaces. The thickness H of the substrate 22 is made greater than a radial interval (d) of the heater 26a. Accordingly, heat from the heater is transmitted through conduction via the substrate for satisfactory heat transfer efficiency, and the substrate having a predetermined thickness is interposed so that a pattern of the heater is not appeared on the back of the article to permit the article to be uniformly heated.</p> |
