发明名称 Semiconductor device and manufacturing method
摘要 A semiconductor device is provided including a circuit employing two or more field-effect transistor that are desired to have equal characteristics, capable of realizing high reliability and superior transistor characteristics. The transistors which are desired to have equal characteristics are placed in the semiconductor device so as to have the same STI trench width (the width of shallow trench isolation adjacent to an active area in which the transistor is formed). By such composition, stress growing in the active area due to the shallow trench isolation is equalized among the transistors, and, thereby, the characteristics of the transistors can be equalized.
申请公布号 US6891761(B2) 申请公布日期 2005.05.10
申请号 US20040767053 申请日期 2004.01.30
申请人 RENESAS TECHNOLOGY CORP. 发明人 KUMAGAI YUKIHIRO;MIURA HIDEO;OHTA HIROYUKI;MISHIMA MICHIHIRO;NAKANISHI KATSUYUKI
分类号 H01L21/76;H01L21/8234;H01L21/8242;H01L27/08;H01L27/108;(IPC1-7):G11C16/06 主分类号 H01L21/76
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