| 摘要 |
An optical tunable filter includes a first substrate 3 having a light transmitting property which includes a movable portion 31 , a second substrate 20 having a light transmitting property which is provided so as to be opposed to the first substrate, a first gap 21 and a second gap 22 which are respectively provided between the movable portion 31 and the second substrate 20 , an interference portion which causes interference of incident light between the movable portion 31 and the second substrate 20 through the second gap 22 , and a driving portion which changes a distance of the second gap 22 by displacing the movable portion 31 with respect to the second substrate 20 using the first gap 21 . This makes it possible to provide an optical tunable filter having a simpler structure and a smaller size, which can be manufactured through a simplified manufacturing process without using a release hole and can achieve stable driving of a movable portion, and a method for manufacturing such an optical tunable filter.
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