发明名称 Sputtering target transport box
摘要 The present invention pertains to a sputtering target transport box having a void the size of a sputtering target, wherein supports for mechanical transport are provided to the bottom plate of the transport box, and a wheel for man-powered transport is provided to the edge portion of the bottom plate. Provided thereby is a sputtering target transport box in which the removal and transport of a sputtering target is easy, and which enables the transport of a sputtering target without causing any damage thereto.
申请公布号 US2005092603(A1) 申请公布日期 2005.05.05
申请号 US20040507235 申请日期 2004.09.09
申请人 NEMOTO FUMIYA;INOUE ATSUSHI 发明人 NEMOTO FUMIYA;INOUE ATSUSHI
分类号 B62B1/24;B65D1/40;B65D19/06;B65D25/20;B65D81/02;B65D85/86;C23C14/00;C23C14/34;H01L21/673;(IPC1-7):C23C14/34 主分类号 B62B1/24
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