发明名称 |
Sputtering target transport box |
摘要 |
The present invention pertains to a sputtering target transport box having a void the size of a sputtering target, wherein supports for mechanical transport are provided to the bottom plate of the transport box, and a wheel for man-powered transport is provided to the edge portion of the bottom plate. Provided thereby is a sputtering target transport box in which the removal and transport of a sputtering target is easy, and which enables the transport of a sputtering target without causing any damage thereto.
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申请公布号 |
US2005092603(A1) |
申请公布日期 |
2005.05.05 |
申请号 |
US20040507235 |
申请日期 |
2004.09.09 |
申请人 |
NEMOTO FUMIYA;INOUE ATSUSHI |
发明人 |
NEMOTO FUMIYA;INOUE ATSUSHI |
分类号 |
B62B1/24;B65D1/40;B65D19/06;B65D25/20;B65D81/02;B65D85/86;C23C14/00;C23C14/34;H01L21/673;(IPC1-7):C23C14/34 |
主分类号 |
B62B1/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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