| 发明名称 |
Method and apparatus for fabricating or altering microstructures using local chemical alterations |
| 摘要 |
A method and apparatus for fabricating or altering a microstructure use means for heating to facilitate a local chemical reaction that forms or alters the submicrostructure.
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| 申请公布号 |
US2005095858(A1) |
申请公布日期 |
2005.05.05 |
| 申请号 |
US20030696771 |
申请日期 |
2003.10.29 |
| 申请人 |
GUHA SUPRATIK;HAMANN HENDRIK F.;MARCHMAN HERSCHEL M.;VON GUTFELD ROBERT J. |
发明人 |
GUHA SUPRATIK;HAMANN HENDRIK F.;MARCHMAN HERSCHEL M.;VON GUTFELD ROBERT J. |
| 分类号 |
H01L21/302;H01L21/311;H01L21/3213;H01L21/336;H01L21/461;H01L21/768;H01L29/786;(IPC1-7):H01L21/302 |
主分类号 |
H01L21/302 |
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