Method of forming thin-film electrodes

摘要

A method of forming a fuel cell electrode includes providing a substrate and at least one deposition device, developing a deposition characteristic profile having at least one porous layer based on pre-determined desired electrode properties, forming a film in accordance with the deposition characteristic profile by sputtering material from the deposition device while varying a relative position of the substrate in relation to the deposition device with respect to at least a first axis.