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发明名称
DRY ETCHING APPARATUS OF SEMICONDUCTOR DEVICE MANUFACTURING EQUIPMENT USING ADDITIONAL PIPELINE FOR IMPROVING ETCHING EFFICIENCY
摘要
申请公布号
KR100489638(B1)
申请公布日期
2005.05.04
申请号
KR19980008363
申请日期
1998.03.12
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
YANG, YUN SIK;CHA, HUN;CHAE, SEUNG GI
分类号
H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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