摘要 |
<p>An integrated semiconductor circuit arrangement includes conductor paths (11-5;22) extending in at least two different planes, in which in at least one of the planes the conductor paths (11-5) are provided in close proximity, and mainly parallel to one another. The conductor paths (11-5) are underlaid at critical points determined by their layout, by a dummy-contact (16-20). The dummy-contacts (16-20) are provided specifically at critical points, which are determined by an interruption of two closely - adjacent, parallel conductor paths. More specifically, the conductor paths have a width of 150 - 250 nm, with the distance between the conductor paths amounting to 130 - 180 nm.</p> |