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发明名称
HAFNIUM SILICIDE TARGET AND METHOD FOR PREPARATION THEREOF
摘要
申请公布号
EP1528120(A1)
申请公布日期
2005.05.04
申请号
EP20030788008
申请日期
2003.07.03
申请人
NIKKO MATERIALS CO., LTD.
发明人
IRUMATA, SHUICHI;SUZUKI, RYO
分类号
C23C14/34;H01L21/28;H01L29/51;(IPC1-7):C23C14/34;H01L29/78;H01L21/336
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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