发明名称 |
Antireflective coating compositions |
摘要 |
Antireflective compositions are provided that contain an ionic thermal acid generator material. Use of such a thermal acid generator material can significantly increase the shelf life of solutions of antireflective compositions in protic media. Antireflective compositions of the invention can be effectively used at a variety of wavelengths used to expose an overcoated photoresist layer, including 248 nm and 193 nm.
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申请公布号 |
US6887648(B2) |
申请公布日期 |
2005.05.03 |
申请号 |
US20040858584 |
申请日期 |
2004.06.02 |
申请人 |
SHIPLEY COMPANY, L.L.C. |
发明人 |
PAVELCHEK EDWARD K.;TREFONAS, III PETER |
分类号 |
G03F7/11;B05D1/36;B05D5/06;G03F7/09;H01L21/027;(IPC1-7):G03C1/76 |
主分类号 |
G03F7/11 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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