发明名称 Semiconductor devices, and methods for same
摘要 Described are preferred processes for conditioning semiconductor devices with deuterium to improve operating characteristics and decrease depassivation which occurs during the course of device operation. Also described are semiconductor devices which can be prepared by such processes.
申请公布号 US6888204(B1) 申请公布日期 2005.05.03
申请号 US19980160657 申请日期 1998.09.25
申请人 THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS 发明人 LYDING JOSEPH W.;HESS KARL
分类号 H01L21/28;H01L21/30;H01L21/324;H01L29/51;(IPC1-7):H01L29/76;H01L31/113 主分类号 H01L21/28
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