发明名称 |
Absorption current image apparatus in electron microscope |
摘要 |
It was hard for conventional SEMs to take measurements at a high speed and take accurate measurements when an insulator exists between an object to probe and the detector, because the conventional SEMs used a continuous electron beam. Also, it was impossible to apply voltage to the sample during the measurement of current. By pulse-modulating the electron beam and extracting a high-frequency signal component from the sample, new SEM equipment disclosed herein detects electrons absorbed in the sample at a high speed and with precision. Precise and high-speed absorption current measurements can be achieved. High-functionality inspection apparatus can be provided.
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申请公布号 |
US6888138(B2) |
申请公布日期 |
2005.05.03 |
申请号 |
US20040868907 |
申请日期 |
2004.06.17 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
OHSHIMA TAKASHI;MAKINO HIROSHI;TOYAMA HIROSHI;SHINADA HIROYUKI |
分类号 |
G01N23/225;G01Q30/02;H01J37/04;H01J37/244;H01J37/28;(IPC1-7):H01J37/28 |
主分类号 |
G01N23/225 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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