| 摘要 |
In a polarized light exposure apparatus, light including ultraviolet rays emitted from a lamp 1 a is condensed by an elliptic condensing mirror, is made parallel by a lens 5 whose position in an optical axis direction is adjustable by a lens moving mechanism, and enters a polarizing element 6. The light incident to the polarizing element 6 is separated and enters the integrator 7 for making irradiance distributions uniform, so that the light is irradiated on a work piece placed on the light irradiation area. Since the position in the optical axis direction is adjustable, the parallelism (Telecen Degree) to the optical axis of principal rays which are incident to the polarizing element 6 or the integrator 7, can be changed. Thus, it is possible to adjust the position of the lens 5 so as to uniform the polarization direction. |
