发明名称 METHOD FOR MANUFACTURING METAL MICROSTRUCTURE
摘要 <p>A method for manufacturing a metal microstructure (1) comprising a resin mold (13). For setting a mild manufacturing condition with little damage of the resin mold (13), and for mass-producing a high- precision metal microstructure (1) by uniform casting, this method is characterized by having the step of forming a resin mold laminate by fixing on a conductive substrate (11) a resin mold (13) having a vacancy penetrating in the thickness direction via a photosensitive polymer (12) the chemical composition of which is varied by an electron ray, ultraviolet ray, or a visible ray, the step of exposing the resin type laminate (2) to the electron ray, ultraviolet ray, or visible ray, the step of removing a photosensitized polymer (12c) present in the vacancy of the resin mold (13), and the step of filling the vacant section of the resin type laminate (2) with a metal (14) by casting.</p>
申请公布号 KR20050039689(A) 申请公布日期 2005.04.29
申请号 KR20047005423 申请日期 2004.04.13
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 HAGA, TSUYOSHI;HIRATA, YOSHIHIRO;YORITA, JUN
分类号 B81C1/00;C25D1/00;H01L21/48;H05K3/20;(IPC1-7):B81C1/00 主分类号 B81C1/00
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