PLASMA RESISTANT MEMBER, MANUFACTURING METHOD FOR THE SAME AND METHOD OF FORMING A THERMAL SPRAY COAT

摘要

The present invention concerns a plasma resistant member comprising Y₂O₃ or YAG thermal performed thermal spray on an alumina base material, wherein the surface roughness Ra of the alumina base material is 5 mum or more and 15 mum or less. By rendering the surface layer of the alumina base material porous to a porosity of 20% or more and 60% or less to a depth of ranging from 10 mum to 1O0 mum, aplasma resistant member having an enhanced adhesion strength can be provided. The aforementioned plasma resistant member can be produced by subjecting the surface of analumina base material to chemical etching, and then performing thermal spray Y₂O₃ or YAG on the roughened surface of the alumina base material to form a plasma resistant layer.