| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface heater in which temperature control in the same face can be performed, and temperature unevenness and pressurizing unevenness are minimized, and provide its manufacturing method. SOLUTION: In the surface heater formed on the substrate face of a prescribed substrate, the heater is provided with a heater pattern and a temperature sensing resistor pattern to detect a temperature in an adjacent region of the heater pattern, and the thickness of the heater pattern in the perpendicular direction with respect to the substrate face is the same as the thickness of the temperature sensing resistor pattern in the perpendicular direction with respect to the substrate face. COPYRIGHT: (C)2005,JPO&NCIPI
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