METHOD FOR PREVENTING STICKING OF CONTAMINANT

摘要

PROBLEM TO BE SOLVED: To provide a method for preventing sticking of contaminants by which carbonized contaminants are prevented from sticking on the inside of a discharging passage of exhaust gas, especially on the inside of a vacuum pump. SOLUTION: This method for preventing the contaminants containing organic compounds or their thermally transformed materials from sticking on the inside of the discharging passage of the exhaust gas containing the organic compounds comprises supply of water vapor to the inside of the discharging passage of the exhaust gas equipped with a suction device. COPYRIGHT: (C)2005,JPO&NCIPI