| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas tightness leak inspection method and a device, capable of shortening the cycle time of the device, improving the processing capacity, simplifying pipe route, reducing the number of apparatuses used, and simplifying the control. SOLUTION: A preparing and scavenging operation step having three passage systems: namely, a passage system constituted of a cover 2, a first valve 3A and a first vacuum pump 5A, a passage system constituted of a first air suction port a, a second valve 3B, a first valve and a first vacuum pump, and a passage system constituted of a second air suction port b, a second valve, a detector 4 and a second vacuum pump, and a leak inspection operation step having a passage system constituted of a cover, a first valve, a second valve, a detector and a second vacuum pump are performed by switching operation between the first valve and the second valve. COPYRIGHT: (C)2005,JPO&NCIPI
|
