发明名称 Compact electronic component including piezo-electric resonator mounted by face-down bonding with improved reliability
摘要 In an electronic component having a piezo-electric resonator 10 formed on an element substrate and obtaining a signal having a predetermined resonant frequency by a bulk wave propagating through a piezo-electric film, a packaging substrate 19 on which the piezo-electric resonator 10 is mounted by face-down bonding through bumps 18, and a lid 21 fixed on the packaging substrate 19 and sealing the piezo-electric resonator 10, a distance between a surface of the piezo-electric resonator 10 facing said packaging substrate 19 and a surface of the packaging substrate 19 facing the piezo-electric resonator 10 is not larger than 100 mum. A maximum diameter of the bump 18 is not larger than 150 mum, when the bump 18 is connected to the packaging substrate 19. A distance between a surface of the piezo-electric resonator 10 facing the lid 21 and a surface of the lid 21 facing the piezo-electric resonator 10 is not larger than 150 mum.
申请公布号 US2005088060(A1) 申请公布日期 2005.04.28
申请号 US20040806469 申请日期 2004.03.23
申请人 发明人 KOMURO EIJU;NAGATSUKA TOSHIYUKI;YASUI TSUTOMU
分类号 H01L21/60;H01L23/02;H01L41/053;H01L41/08;H01L41/09;H01L41/18;H03H9/02;H03H9/10;H03H9/17;H03H9/70;(IPC1-7):H01L41/053 主分类号 H01L21/60
代理机构 代理人
主权项
地址