TRANSFORMER IGNITION CIRCUIT FOR A TRANSFORMER COUPLED PLASMA SOURCE

摘要

According to one embodiment, an apparatus is described. The apparatus includes a vacuum chamber (150), an electrical transformer (130) coupled to the vacuum chamber, and an ignition circuit. The electrical transformer (150) induces an electromagnetic field within the vacuum chamber (150). The transformer (130) includes a primary winding (160) and a magnetic core. In addition, the transformer includes a secondary winding (180), to which the circuit used to ignite the vacuum chamber (150) is coupled. The ignition circuit (140) is used to establish a controlled capacitive discharge that is used to ignite the vacuum chamber (150).