发明名称 MICROSTRUCTURAL COMPONENT, ESPECIALLY MICROSTRUCTURED HIGH-FREQUENCY COMPONENT
摘要 The invention relates to a microstructural component (5), especially a microstructured high-frequency component, comprising a base body (11) on which an especially planar conductor structure (17, 17', 17", 17" ) is partially arranged. A seal area (16) is also provided wherein the conductor structure (17, 17', 17", 17" ) is enclosed by the base body (11) and glass (19). The conductor structure (17, 17', 17", 17" ), which is enclosed by the glass (19), is primarily used as a hermetically sealed leadthrough for high-frequency electromagnetic waves from the inner chamber (21) of a capped component (12) or sensor element.
申请公布号 EP1525616(A1) 申请公布日期 2005.04.27
申请号 EP20030722233 申请日期 2003.03.27
申请人 ROBERT BOSCH GMBH 发明人 REIMANN, MATHIAS;SCHWEGLER, LEONORE;ULM, MARKUS;DENIZ, HUERSEN;MUELLER-FIEDLER, ROLAND
分类号 H01L23/10;H01L23/66 主分类号 H01L23/10
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