发明名称 Methods for making metallocene compounds
摘要 A method for producing Group 8 (VIII) metallocene or metallocene-like compounds employs a compound that includes a Cp' anion, such as found, together with a counterion, in a cyclopentadienide or cyclopentadienide-like salt. In one embodiment, the method includes reacting a metal salt, a (Cp) compound, such as a substituted or unsubstituted cyclopentadiene or indene, and a ligand (L) to form an intermediate compound and reacting the intermediate compound with a Cp' compound, eg., a cyclopentadienide or cyclopentadienide-like salt, where the metal salt can be is a ruthenium, an osmium or an iron halide or nitrate and L is an electron pair donor. Unsubstituted, mono-substituted as well as symmetrically or asymmetrically di- or multi-substituted metallocenes or metallocene-like compounds can be produced. In another embodiment, unsubstituted or symmetrically substituted metallocenes are formed by reacting MX<SUB>2</SUB>(PPh<SUB>3</SUB>)<SUB>m </SUB>with a Cp' compound, where m=3 or 4. The method can be used to form precursors for chemical vapor deposition of thin films.
申请公布号 US6884901(B2) 申请公布日期 2005.04.26
申请号 US20030685777 申请日期 2003.10.16
申请人 PRAXAIR TECHNOLOGY, INC. 发明人 THOMPSON DAVID M.;HOOVER CYNTHIA A.
分类号 C23C16/18;C23C16/40;(IPC1-7):C07F17/00;C23C16/00 主分类号 C23C16/18
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