发明名称 |
Metal wire fuse structure with cavity. |
摘要 |
An integrated circuit has primary devices and redundant devices being selective substituted for the primary devices through at least one fuse. The fuse includes a first layer having at least one fuse link region, a second layer over the first layer and cavities in the second layer above the fuse link region. <IMAGE> |
申请公布号 |
HK1035436(A1) |
申请公布日期 |
2005.04.22 |
申请号 |
HK20010104466 |
申请日期 |
2001.06.28 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION;INFINEON TECHNOLOGIES NORTH AMERICA CORPORATION |
发明人 |
AXEL BRINTZINGER;KIEWRA, EDWARD, W.;CHANDRASEKHAR NARAYAN;RADENS, CARL, J. |
分类号 |
H01L21/82;G11C29/04;H01H85/00;H01L21/8242;H01L23/525;H01L27/02;H01L27/108;(IPC1-7):H01L;G11C |
主分类号 |
H01L21/82 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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