发明名称 Metal wire fuse structure with cavity.
摘要 An integrated circuit has primary devices and redundant devices being selective substituted for the primary devices through at least one fuse. The fuse includes a first layer having at least one fuse link region, a second layer over the first layer and cavities in the second layer above the fuse link region. <IMAGE>
申请公布号 HK1035436(A1) 申请公布日期 2005.04.22
申请号 HK20010104466 申请日期 2001.06.28
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION;INFINEON TECHNOLOGIES NORTH AMERICA CORPORATION 发明人 AXEL BRINTZINGER;KIEWRA, EDWARD, W.;CHANDRASEKHAR NARAYAN;RADENS, CARL, J.
分类号 H01L21/82;G11C29/04;H01H85/00;H01L21/8242;H01L23/525;H01L27/02;H01L27/108;(IPC1-7):H01L;G11C 主分类号 H01L21/82
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