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发明名称
ion beam irradiation device for forming an alignment layer
摘要
申请公布号
KR100484949(B1)
申请公布日期
2005.04.22
申请号
KR20020085414
申请日期
2002.12.27
申请人
发明人
分类号
G02F1/1337;G21K5/04;H01J27/08;H01J37/08;(IPC1-7):G02F1/133
主分类号
G02F1/1337
代理机构
代理人
主权项
地址
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