发明名称 |
Force scanning probe microscope |
摘要 |
A force scanning probe microscope (FSPM) and associated method of making force measurements on a sample includes a piezoelectric scanner having a surface that supports the sample so as to move the sample in three orthogonal directions. The FSPM also includes a displacement sensor that measures movement of the sample in a direction orthogonal to the surface and generates a corresponding position signal so as to provide closed loop position feedback. In addition, a probe is fixed relative to the piezoelectric scanner, while a deflection detection apparatus is employed to sense a deflection of the probe. The FSPM also includes a controller that generates a scanner drive signal based on the position signal, and is adapted to operate according to a user-defined input that can change a force curve measurement parameter during data acquisition.
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申请公布号 |
US2005081610(A1) |
申请公布日期 |
2005.04.21 |
申请号 |
US20040756579 |
申请日期 |
2004.01.13 |
申请人 |
STRUCKMEIER JENS;GOTTHARD DOUG;OHLER BEN |
发明人 |
STRUCKMEIER JENS;GOTTHARD DOUG;OHLER BEN |
分类号 |
G01Q10/00;G01Q10/06;G01Q60/42;G01Q70/18;H02N2/04;(IPC1-7):G01N13/10;G01L5/00 |
主分类号 |
G01Q10/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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