JUNCTION-TYPE PROBE FOR ELECTRICAL CHARACTERISTICS MEASUREMENT, AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a probe measuring the electrical characteristics of a semiconductor integrated circuit that is low priced but has high precision, by forming the majority part thereof with low-cost tungsten, to form only the top end with metal particles having proper electrical conductivity. SOLUTION: One or several kinds of metal particles are bonded onto the top end of a refractory metal needle probe by pulse discharging, and thereafter, are processed to a predetermined shape. COPYRIGHT: (C)2005,JPO&NCIPI