| 摘要 |
The present invention relates to a thermal flowmeter capable of sensing a flow rate in either direction, having a linear output characteristic, and producing a stable output without impairing the response characteristic. In the thermal flowmeter, a laminate is fitted in a channel space formed in a body, forming a main channel. The laminate includes a mesh sheet so that a mesh portion is provided between the main channel and a sensor channel. A measurement chip is provided with an upstream temperature sensing resistor, a downstream temperature sensing resistor, a heating resistor, and a fluid temperature sensing resistor. By an electric circuit, the heating resistor and the fluid temperature sensing resistor are controlled to provide a constant temperature difference. Accordingly, the flow rate of a fluid under measurement is measured based on a temperature difference between the upstream and downstream temperature sensing resistors.
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