| 摘要 |
PROBLEM TO BE SOLVED: To enhance the hermetic property of a connecting part between a pressure sensor body and a connector. SOLUTION: The pressure sensor body comprises a housing 10 having a pressure introducing hole 12, a pressure detection element 22 consisting of a semiconductor element having a piezo-resistance effect, a holder 30 adhering the pressure detection element 22, a connector case 70, and an inner space 72 which is formed by connecting hermetically the pressure detection element 22 and the holder 30. The connector 80 mounted on the connector case 70 and an electrode pad are connected by an elastic body 50 which has an elasticity and an electrical conductivity, with installing a circuit substrate 40 having the electrode pad on the holder 30. The holder 30 is supported by the housing 10 through a guide frame 90 and an O-ring 95. COPYRIGHT: (C)2005,JPO&NCIPI
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