CONFOCAL INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a confocal inspection device whose mechanism is simplified and whose controllability is enhanced. SOLUTION: A confocal inspection device 1 is provided with: an objective lens 5 arranged facing an inspection object 2; a light projecting part 10 for projecting bright spot light 10a to the inspection object 2 through the objective lens 5; a two-dimensional scanning mirror 20 for reflecting the projected light and two-dimensionally scanning the inspection object 2 with the bright spot light 10a; an image forming lens 6 for forming an image of the projected bright spot light 10a returning from the inspection object 2 through the objective lens 5; a light receiving part 40 for receiving the light formed into an image by the image forming lens 6; and a diaphragm part 41 for converging the light to be received by the light receiving part 40. COPYRIGHT: (C)2005,JPO&NCIPI