| 摘要 |
PROBLEM TO BE SOLVED: To provide a load sensor having a simple structure, excellent durability, detection accuracy and sensitivity. SOLUTION: When load is applied to an operation body 15, a movable body 14 pressurizes a protrusion 20b so that a diaphragm 20 is displaced. At this time, since a distortion occurs in first to fourth distortion sensors G1 to G4 (pressure sensing means 21) constituting a bridge circuit, the load F can be detected. The pressure sensing means 21 is provided on a surface on the Z2 side of the diaphragm 20, and the protrusion 20b provided on a surface on the Z1 side of the diaphragm 20 does not directly press the pressure sensing means 21. Thus, no mechanical stress is applied to the pressure sensing means 21 to improve the durability of the load sensor 10. COPYRIGHT: (C)2005,JPO&NCIPI
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