Method for supporting autofocus system of microscope esp. during wafer inspection, has height card for wafer chuck unit stored in system as correction table

摘要

A method for supporting autofocus systems for microscope appliances, which in addition to the autofocus system has a computer-controlled table with a receptacle (e.g. chuck) for a wafer, in which a 'height card' for the wafer chuck unit is filed as a correction table in the system and during table adjustment, the focus position is corrected by the corresponding value from the correction table and then the autofocus is set into operation.