| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for film formation, by which a uniform film is formed. <P>SOLUTION: The method for forming a functional film on a substrate 48 by discharging a liquid 2 from a liquid droplet discharge apparatus comprises premixing the liquid 2 before discharge with silicone oil so as to adsorb the silicone oil having viscosity higher than that of a solvent of the liquid droplet 4 on the surface of the discharged liquid droplet 4. Consequently, since the coating film 6 of the silicone oil is formed on the surface of the liquid droplet 4, resistance is formed on the surface of the liquid droplet 4 so that occurrence of Marangoni convection in the inside of the liquid droplet 4 is prevented. Consequently, the uniform film is formed. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
