| 摘要 |
PROBLEM TO BE SOLVED: To solve such a problem that in the conventional manufacturing method wherein the number of manufacturing steps is reduced, when a channel length is shortened, a manufacturing margin is small and a yield is lowered. SOLUTION: A four sheet mask process and a three sheet mask process of TN type and IPS type liquid crystal display devices are constructed by combining technologies of a novel technology which first forms an etch stop layer and then rationalizes a scanning line forming step and a contact forming step by introducing a halftone exposure technology, a new technology which rationalizes a step for forming a protective layer of an electrode terminal by introducing a halftone exposure technology to an anodization step of a source/drain wiring which is a well-known technology, and a rationalization technology simultaneously forming a pixel electrode and a scanning line which is a well-known technology. COPYRIGHT: (C)2005,JPO&NCIPI |
