| 摘要 |
PROBLEM TO BE SOLVED: To sharply shorten tact time by causing a specimen to rapidly reach an environmental temperature condition, the specimen being the object of inspection, working, etc., as to a measuring instrument, an inspection device, an aligner, a stepper, an exposing device, a printer, a cutting/working machine, etc. SOLUTION: This thermal chamber for a measuring instrument is provided with a sub-chamber for shortening time for causing a carried-in specimen to reach an internal temperature of a thermal chamber from an ambient temperature and the specimen is caused to rapidly reach a prescribed temperature by powerful wind force in the sub-chamber. A means is provided for thereafter carrying the specimen of a temperature having reached the predetermined temperature to a main chamber. COPYRIGHT: (C)2005,JPO&NCIPI
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